Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern
AssigneeCentral Glass Company, Limited
InventorsHaruhiko Komoriya, Shinichi Sumida, Michitaka Ootani, Takeo Komata, Kazuhiko Maeda
Life of this patent
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Abstract
The present invention relates to, for example, a fluorine-containing cyclic compound represented by the following general formula (1). In the general formula (1), R1a is a C1-C25 cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group; each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group; and each of R1a, R2 and R3 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.
Claims12
A fluorine-containing cyclic compound represented by the following general formula (3):
- wherein
- R1b is a C1-C25 cyclic alkyl group, cyclic alkenyl group, cyclic alkynyl group, aryl group, or heterocyclic group, and may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond;
- each of R2 to R7 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond;
- and
- R8 is a carbonyl group or methylene group, or a single bond.
A fluorine-containing polymer compound having a weight average molecular weight of 1,000 to 1,000,000, comprising a repeating unit represented by the following general formula (10):
- wherein
- R1b represents a C1-C25 cyclic alkyl group, cyclic alkenyl group, cyclic alkynyl group, aryl group, or heterocyclic group, and may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond;
- each of R2 to R7 independently represents a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group, and may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond;
- and
- R8 represents a carbonyl group or methylene group, or a single bond.
Dependencies are inferred from the claim text.