Method and system for providing optical proximity correction for structures such as a PMR nose
AssigneeWestern Digital (Fremont), LLC
InventorsYizhong Wang, Hai Sun, Hongping Yuan, Winnie Yu
Life of this patent
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Abstract
A mask for transferring a pattern for portion of a magnetic recording transducer is disclosed. The masks includes one corner corresponding to an angle of more than ninety degrees and less than one hundred eighty degrees. The mask also includes at least one rectangular serif residing at the corner.
Claims19
A mask for transferring a pattern for portion of a magnetic recording transducer comprising:
- a one corner corresponding to an angle having a size of more than ninety degrees and less than one hundred eighty degrees;
- at least one rectangular serif residing at the corner and having at least one side length that is based on the size of the angle wherein the corner has an apex and wherein the at least one rectangular serif includes a first serif having a first center at the apex.
A mask for transferring a pattern for portion of a perpendicular magnetic recording transducer comprising:
- a corner having an apex and corresponding to an angle of at least one hundred ten degrees and not more than one hundred sixty degrees;
- a pair of square serifs residing at the corner, a first serif of the pair of square serifs having a first center at the apex, a first edge, and a second edge, a second serif of the pair of serifs having a third edge residing half-way between the first center and the second edge and, the first serif and the second serif having a side length of at least thirty nanometers and not more than one hundred nanometers, the side length being smaller for the angle being larger.
A method for transferring a pattern for portion of a magnetic recording transducer comprising:
- providing a mask including a corner and at least one rectangular serif, the corner corresponding to an angle having a size of more than ninety degrees and less than one hundred eighty degrees, the at least one rectangular serif residing at the corner and having at least one side length that is based on the size of the angle wherein the corner has an apex and wherein the at least one rectangular serif includes a first serif having a first center at the apex;
- optically transferring the pattern from the mask to a resist layer to provide a resist mask;
- and
- forming the portion of the magnetic recording transducer using the resist mask.
Dependencies are inferred from the claim text.