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US 7,736,728 B2Granted
Coated substrates and methods for their preparation
AssigneeDow Corning Corporation
InventorsMark Loboda, Steven Snow, William Weidner, Ludmil Zambov
Life of this patent
Estimating the term…
Abstract
Coated substrates containing at least one barrier layer comprising hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3 and at least one barrier layer selected from aluminum, aluminum oxide, aluminum nitride, aluminum oxynitride, titanium, titanium oxide, titanium nitride, and titanium oxynitride.
Claims10
A coated substrate, consisting of:
- a substrate;
- a first barrier layer on the substrate, wherein the first barrier layer comprises hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3;
- and
- at least two alternating buffer and barrier layers on the first barrier layer, wherein each alternating buffer layer comprises hydrogenated silicon oxycarbide having a density less than 1.6 g/cm3, and each alternating barrier layer is independently selected from hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3, aluminum, aluminum oxide, aluminum nitride, aluminum oxynitride, titanium, titanium oxide, titanium nitride, and titanium oxynitride, provided at least one alternating barrier layer is selected from aluminum, aluminum oxide, aluminum nitride, aluminum oxynitride, titanium, titanium oxide, titanium nitride, and titanium oxynitride.
1 more element
A coated substrate, consisting of:
- a substrate;
- a first buffer layer on the substrate, wherein the first buffer layer comprises hydrogenated silicon oxycarbide having a density less than 1.6 g/cm3;
- and
- at least three alternating barrier and buffer layers on the first buffer layer, wherein each alternating barrier layer is independently selected from hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3, aluminum, aluminum oxide, aluminum nitride, aluminum oxynitride, titanium, titanium oxide, titanium nitride, and titanium oxynitride, and each alternating buffer layer comprises hydrogenated silicon oxycarbide having a density less than 1.6 g/cm3, provided at least one alternating barrier layer is hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3, and at least one alternating barrier layer is selected from aluminum, aluminum oxide, aluminum nitride, aluminum oxynitride, titanium, titanium oxide, titanium nitride, and titanium oxynitride.
1 more element
Dependencies are inferred from the claim text.