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US 7,735,419 B2Granted
System for soft lithography
AssigneeLabrador Research LLC
InventorMark C. Peterman
Life of this patent
Estimating the term…
Abstract
A transfer sheet placed between a vacuum chuck and a stamp in a soft lithography aligner facilitates three dimensional manufacturing with elastomeric materials.
Claims10
An aligner comprising:
- A vacuum chuck for releasably holding a transfer sheet and an elastomeric stamp;
- a substrate support for holding a substrate to be contacted by said elastomeric stamp;
- and
- said transfer sheet made of a polymer material;
- wherein,
- the vacuum chuck and the substrate support can be translated and rotated with respect to one another,
- the transfer sheet separates the vacuum chuck from said elastomeric stamp;
- the transfer sheet is smooth such that it can be tightly gripped or easily released by the vacuum chuck, and,
- the transfer sheet is thin and flexible such that it can be easily peeled from a sticky elastomeric surface of said elastomeric stamp using less force than is required to separate said stamp from the substrate.
6 more elements
An aligner comprising:
- A magnetic chuck for releasably holding a transfer sheet and an elastomeric stamp;
- a substrate support for holding a substrate to be contacted by said elastomeric stamp;
- and
- said transfer sheet made of metal foil;
- wherein,
- the magnetic chuck and the substrate support can be translated and rotated with respect to one another,
- the transfer sheet separates the magnetic chuck from said elastomeric stamp;
- the transfer sheet is smooth such that it can be tightly gripped or easily released by the magnetic chuck, and,
- the transfer sheet is thin and flexible such that it can be easily peeled from a sticky elastomeric surface of said elastomeric stamp using less force than is required to separate said stamp from the substrate.
6 more elements
Dependencies are inferred from the claim text.