Back to results
US 7,734,014 B2Granted
Extreme UV and soft X ray generator
AssigneeKoninklijke Philips Electronics N.V.
InventorsKlaus Bergmann, Willi Neff
Life of this patent
Estimating the term…
Abstract
A gas discharge source, in particular, for generating extreme ultraviolet and/or soft X-radiation, has a gas-filled intermediate electrode space located between two electrodes, devices for the admission and evacuation of gas, and one electrode that has an opening that defines an axis of symmetry and is provided for the discharge of radiation. A diaphragm exhibits at least one opening on the axis of symmetry and operates as a differential pump stage, between the two electrodes.
Claims13
A gas discharge source for generating extreme ultraviolet and/or soft X-radiation, comprising:
- a first electrode having an opening therein defining an axis of symmetry and providing an outlet for a discharge of radiation;
- a second electrode comprising a hollow electrode substantially completely surrounding a cavity save for an opening therethrough positioned along the axis of symmetry, the second electrode opening facing the first electrode;
- and
- a diaphragm positioned between the first and the second electrode and having an opening positioned along the axis of symmetry, the diaphragm acting as a differential pump stage, a space between the diaphragm and the first and the second electrode comprising an intermediate electrode space adapted for being filled with a gas, wherein:
- the first electrode has a gas inlet leading into the intermediate electrode space from exterior the first electrode;
- and
- the second electrode has a gas inlet leading into the intermediate electrode space from exterior the second electrode, the second electrode gas inlet not in direct fluid communication with the cavity.
4 more elements
Dependencies are inferred from the claim text.