Optical multilayer mirror and fabry-perot interferometer having the same

An optical multilayer mirror including a lower mirror and an upper mirror, the lower mirror being arranged over a substrate, the upper mirror facing the lower mirror via a gap,

• the lower mirror comprising:
• a first high refractive-index layer that is arranged over the substrate and features a first refractive index;
• a first low refractive-index layer that is arranged to face the first high refractive-index layer and features a second refractive index smaller than the first refractive index;
• a second high refractive-index layer that is arranged to cover the first low refractive-index layer;
• and
• a first reinforcing section that is configured to support a portion of the second high refractive-index layer covering a top surface of the first low refractive-index layer and reach the first high refractive-index layer via the first low refractive-index layer,
• the upper mirror comprising:
• a third high refractive-index layer that is arranged over the substrate and features the first refractive index;
• a second low refractive-index layer that is arranged to face the third high refractive-index layer and features the second refractive index;
• a fourth high refractive-index layer that is arranged to cover the second low refractive-index layer;
• and
• a second reinforcing section that is configured to support a portion of the fourth high refractive-index layer covering a top surface of the second low refractive-index layer and reach the third high refractive-index layer via the second low refractive-index layer,
• wherein the first reinforcing section is configured as a first metal layer that crosses the first low refractive-index layer and ranges between the second high refractive-index layer and the first high refractive-index layer;
• and
• wherein the second reinforcing section is configured as a second metal layer that crosses the second low refractive-index layer and ranges between the fourth high refractive-index layer and the third high refractive-index layer.

An optical multilayer mirror including a lower mirror and an upper mirror, the lower mirror being arranged over a substrate, the upper mirror facing the lower mirror via a gap,

• the lower mirror comprising:
• a first high refractive-index layer that is arranged over the substrate and features a first refractive index;
• a first low refractive-index layer that is arranged to face the first high refractive-index layer and features a second refractive index smaller than the first refractive index;
• a second high refractive-index layer that is arranged to cover the first low refractive-index layer;
• and
• a first reinforcing section that is configured to support a portion of the second high refractive-index layer covering a top surface of the first low refractive-index layer and reach the first high refractive-index layer via the first low refractive-index layer,
• the upper mirror comprising:
• a third high refractive-index layer that is arranged over the substrate and features the first refractive index;
• a second low refractive-index layer that is arranged to face the third high refractive-index layer and features the second refractive index;
• a fourth high refractive-index layer that is arranged to cover the second low refractive-index layer;
• and
• a second reinforcing section that is configured to support a portion of the fourth high refractive-index layer covering a top surface of the second low refractive-index layer and reach the third high refractive-index layer via the second low refractive-index layer,
• wherein in the lower mirror, the first low refractive-index layer is divided into segmented portions and a top surface of each of the segmented portions has an identical polygonal shape;
• and
• wherein in the upper mirror, the second low refractive-index layer is divided into segmented portions and a top surface of each of the segmented portions has the identical polygonal shape.