Fourier transform spectrometer
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsHakan Urey, Calgar Ataman
Life of this patent
Estimating the term…
Abstract
The invention relates to a Fourier transform spectrometer comprising a binary grating with variable depth, the grating comprising a first set of mirrors and a second set of mirrors, the mirrors of the first set of mirrors and the mirrors of the second set of mirrors being arranged in an alternating order and at least one of the sets of mirrors being carried by fingers of a comb structure of a wafer, the spectrometer further comprising an actuator for prompting a motion of the second set of mirrors and a detector for detecting a radiation reflected by the grating, the mirrors being orientated in a plane defined by said wafer and said motion of the second set of mirrors being given by a translation in a direction vertical to said wafer plane.
Claims8
A Fourier transform spectrometer comprising a binary grating with variable depth, the grating comprising a first set of mirrors and a second set of mirrors, the mirrors of the first set of mirrors and the mirrors of the second set of mirrors being arranged in an alternating order and at least one of the sets of mirrors being carried by fingers of a comb structure of a device, the spectrometer further comprising an actuator for prompting an oscillating motion of the second set of mirrors and a detector for detecting a radiation reflected by the grating, wherein
- the mirrors are orientated in a plane defined by said device and that said motion of the second set of mirrors is given by a translation in a direction vertical to said device plane by an amount larger than the shortest wavelength of interest;
- wherein said actuator is given by an electronic comb drive actuator being formed by said comb structure carrying the mirrors;
- and
- wherein the second set of mirrors is elastically connected to the first set of mirrors by flexural means, allowing the oscillating motion of the second set of mirrors.
Dependencies are inferred from the claim text.