High temperature pressure transducer employing a metal diaphragm
AssigneeKulite Semiconductor Products, Inc.
InventorAnthony D. Kurtz
Life of this patent
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Abstract
A pressure transducer includes a diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.
Claims9
A pressure transducer, comprising:
- a diaphragm, having an active region, and capable of deflecting when a force is applied to said diaphragm,
- a sensor array disposed on a single substrate, said substrate secured to said diaphragm,
- said sensor array having a first outer sensor near an edge of said diaphragm at a first location and on said active region, a second outer sensor near an edge of said diaphragm at a second location and on said active region, and at least one center sensor overlying a center of said diaphragm, said sensors connected in a bridge array to provide an output voltage proportional to said force applied to said diaphragm.
A pressure transducer, comprising:
- a diaphragm, having an active region, and capable of deflecting when a force is applied to said diaphragm,
- a sensor array disposed on a single substrate, said substrate secured to said diaphragm, said sensor array having a first outer sensor near an edge of said diaphragm at a first location and on said active region, a second outer sensor near an edge of said diaphragm at a second location and on said active region, and at least one center sensor substantially overlying a center of said diaphragm, said sensors connected in a bridge array to provide an output voltage proportional to said force applied to said diaphragm;
- wherein said substrate is a wafer of silicon, and each of said sensors is a P+ piezoresistor positioned on an oxide layer, said oxide layer being on said silicon wafer.
A pressure transducer, comprising:
- a diaphragm, having an active region, and capable of deflecting when a force is applied to said diaphragm,
- a sensor array disposed on a single substrate, said substrate secured to said diaphragm, said sensor array having a first outer sensor near an edge of said diaphragm at a first location and on said active region, a second outer sensor near an edge of said diaphragm at a second location and on said active region, and at least one center sensor substantially overlying a center of said diaphragm, said sensors connected in a bridge array to provide an output voltage proportional to said force applied to said diaphragm;
- wherein said substrate has opposing ends, said first outer sensor being at one of said opposing ends and said second outer sensor being at the other of said opposing ends, said substrate having a main portion width and being relatively narrow at said opposing ends.
A pressure transducer, comprising:
- a diaphragm, having an active region, and capable of deflecting when a force is applied to said diaphragm,
- a sensor array disposed on a single substrate, said substrate secured to said diaphragm, said sensor array having a first outer sensor near an edge of said diaphragm at a first location and on said active region, a second outer sensor near an edge of said diaphragm at a second location and on said active region, and at least one center sensor substantially overlying a center of said diaphragm, said sensors connected in a bridge array to provide an output voltage proportional to said force applied to said diaphragm;
- wherein said diaphragm comprises an end wall of a closed cylinder and is metal.
Dependencies are inferred from the claim text.