Test structure for resistive open detection using voltage contrast inspection and related methods
AssigneeInternational Business Machines Corporation
InventorsIshtiaq Ahsan, Mark B. Ketchen, Kevin McStay, Oliver D. Patterson
Life of this patent
Estimating the term…
Abstract
A test structure for resistive open detection using voltage contrast (VC) inspection and method for using such structure are disclosed. The test structure may include a comparator within the IC chip for comparing a resistance value of a resistive element under test to a reference resistance and outputting a result of the comparing that indicates whether the resistive open exists in the resistive element under test, wherein the result is detectable by the voltage contrast inspection.
Claims29
A test structure for detecting a resistive open during forming of an integrated circuit (IC) chip using voltage contrast inspection, the IC chip including a resistive element under test, the test structure comprising:
- a comparator within the IC chip for comparing a resistance value of the resistive element under test to a reference resistance and outputting a result of the comparing that indicates whether the resistive open exists in the resistive element under test,
- wherein the result is detectable by the voltage contrast inspection.
A method of detecting a resistive open during forming of an integrated circuit (IC) chip, the IC chip including a resistive element under test, using voltage contrast inspection, the method comprising:
- forming a test structure in the IC chip, the test structure including a comparator for comparing a resistance value of the resistive element under test to a reference resistance and outputting a result of the comparing that indicates whether the resistive open exists in the resistive element under test;
- and
- performing the voltage contrast inspection of the test structure that obtains the result.
A method of powering a test structure in a wafer, the wafer including a resistive element under test, the method comprising:
- providing a capacitor coupled to the test structure, the capacitor including a conductor at a surface of the wafer;
- and
- charging the capacitor using a voltage contrast (VC) inspection tool used to evaluate the test structure, wherein the test structure includes:
- a comparator within an integrated circuit (IC) chip of the wafer for comparing a resistance value of the resistive element under test to a reference resistance and outputting a result of the comparing that indicates whether a resistive open exists in the resistive element under test, wherein the result is detectable by the voltage contrast inspection tool.
Dependencies are inferred from the claim text.