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AssigneeSUSS MicroTec Test Systems GmbH
InventorsStojan Kanev, Hans-Jurgen Fleischer, Stefan Kressig, Jorg Kiesewetter
Estimating the term…
A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.
A method for positioning a probe card with probe needles, the needles having needle tips, relative to a surface of a substrate to be tested, in a direction perpendicular to the surface of the substrate, comprising:
Arrangement for positioning a probe card with probe needles, which needles have needle tips and are arranged on the probe card such that the needles are oriented in position, comprising:
Dependencies are inferred from the claim text.