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US 7,733,100 B2Granted
System and method for modulation mapping
AssigneeDCG Systems, Inc.
InventorSteven Kasapi
Life of this patent
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Abstract
An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
Claims29
A system for testing an integrated circuit microchip using laser probing, comprising:
- a laser source providing a laser beam;
- a beam optics receiving said laser beam and focusing said laser beam onto a selected spot on said microchip;
- a photosensor receiving reflected laser light that is reflected from said microchip and providing an electrical signal;
- collection electronics receiving the electrical signal from said photosensor and providing an output signal;
- an analysis system receiving said output signal over a specified period of time and providing a total power signal corresponding to the total radiation power received over the specified period of time.
2 more elements
Dependencies are inferred from the claim text.