Piezoelectric driven MEMS device

A piezoelectric driven MEMS device comprising:

• a substrate;
• a first actuator which has a first fixed end fixed at least at one end to the substrate, which comprises a first lower electrode, a first piezoelectric film formed on the first lower electrode, and a first upper electrode formed on the first piezoelectric film, and which can be operated by applying voltages to the first lower electrode and the first upper electrode;
• a second actuator which has a second fixed end fixed at least at one end to the substrate, which is disposed in parallel with the first actuator, which comprises a second lower electrode, a second piezoelectric film formed on the second lower electrode, and a second upper electrode formed on the second piezoelectric film, and which can be operated by applying voltages to the second lower electrode and the second upper electrode;
• a third actuator which has a third fixed end fixed at least at one end to the substrate, which is disposed across the first actuator from the second actuator and in parallel with the first actuator, which comprises a third lower electrode, a third piezoelectric film formed on the third lower electrode, and a third upper electrode formed on the third piezoelectric film so as to become the same layer as the first upper electrode, and which can be operated by applying voltages to the third lower electrode and the third upper electrode;
• and
• an electric circuit element having a first action part connected to the first actuator, a second action part connected to the second actuator, and a third action part connected to the third actuator.

A piezoelectric driven MEMS device, comprising:

• a substrate;
• a first actuator which has a first fixed end fixed at least at one end to the substrate, which comprises a first lower electrode, a first lower piezoelectric film formed on the first lower electrode, a first intermediate electrode formed on the first lower piezoelectric film, a first intermediate electrode formed on the first lower piezoelectric film, a first upper piezoelectric film formed on the first intermediate electrode, and a first upper electrode formed on the first upper piezoelectric film, and which can be operated by applying voltages to the first intermediate electrode and at least one of the first lower electrode and the first upper electrode;
• a second actuator which has a second fixed end fixed at least at one end to the substrate, which is disposed in parallel with the first actuator, which comprises a second lower electrode, a second piezoelectric film formed on the second lower electrode, a second intermediate electrode formed on the second lower piezoelectric film, a second upper piezoelectric film formed on the second intermediate electrode, and a second upper electrode formed on the second upper piezoelectric film, and which can be operated by applying voltages to the second intermediate electrode and at least one of the second lower electrode and the second upper electrode;
• an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator
• the first action part comprises a plurality of first comb teeth which are provided on a side part of the first actuator so as to be adjacent to the second actuator and which extend toward the second actuator, and each of the first comb teeth comprises a third lower electrode, a third lower piezoelectric film formed on the third lower electrode, a third intermediate electrode formed on the third lower piezoelectric film, a third upper piezoelectric film formed on the third intermediate electrode, and a third upper electrode formed on the third upper piezoelectric film, and
• the second action part comprises a plurality of second comb teeth which are provided on a side part of the second actuator so as to be adjacent to the first actuator, which extend toward the first actuator and which are alternated with the first comb teeth, and each of the second comb teeth comprises a fourth lower electrode, a fourth lower piezoelectric film formed on the fourth lower electrode, a fourth intermediate electrode formed on the fourth lower piezoelectric film, a fourth upper piezoelectric film formed on the fourth intermediate electrode, and a fourth upper electrode formed on the fourth piezoelectric film.

A piezoelectric driven MEMS device, comprising:

• a substrate;
• a first actuator which has a first fixed end fixed at least at one end to the substrate, which comprises a first lower electrode, a first piezoelectric film formed on the first lower electrode, and a first upper electrode formed on the first piezoelectric film, and which can be operated by applying voltages to the first lower electrode and the first upper electrode;
• a second actuator which has a second fixed end fixed at least at one end to the substrate, which is disposed in parallel with the first actuator, which comprises a second lower electrode, a second piezoelectric film formed on the second lower electrode, and a second upper electrode formed on the second piezoelectric film, and which can be operated by applying voltages to the second lower electrode and the second upper electrode;
• an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator,
• wherein the first action part comprises a first main body part provided on a side part of the first actuator along the first actuator so as to be adjacent to the second actuator, a first connection part which connects the first actuator to the first main body part so as to electrically insulate them from each other, and a first extension part connected to the first main body part to extend toward the second actuator, the first main body part comprises a third lower electrode, a third lower piezoelectric film formed on the third lower electrode, a third intermediate electrode formed on the third lower piezoelectric film, a third upper piezoelectric film formed on the third intermediate electrode, and a third upper electrode formed on the third upper piezoelectric film, and the first extension part comprises a first extension electrode, and
• the second action part comprises a second main body part provided on a side part of the second actuator along the second actuator so as to be adjacent to the first actuator, a second connection part which connects the second actuator to the second main body part so as to electrically insulate them from each other, and a second extension part connected to the second main body part to extend toward the first actuator, the second main body part comprises a fourth lower electrode, a fourth lower piezoelectric film formed on the fourth lower electrode, a fourth intermediate electrode formed on the fourth lower piezoelectric film, a fourth upper piezoelectric film formed on the fourth intermediate electrode, and a fourth upper electrode formed on the fourth upper piezoelectric film, and the second extension part comprises a second extension electrode, and
• the first connection part comprises piezoelectric films, and
• the second connection part comprises piezoelectric films.

A piezoelectric driven MEMS device comprising:

• a substrate;
• a first actuator which has a first fixed end fixed at least at one end to the substrate, which comprises a first lower electrode, a first lower piezoelectric film formed on the first lower electrode, a first intermediate electrode formed on the first lower piezoelectric film, a first intermediate electrode formed on the first lower piezoelectric film, a first upper piezoelectric film formed on the first intermediate electrode, and a first upper electrode formed on the first upper piezoelectric film, and which can be operated by applying voltages to the first intermediate electrode and at least one of the first lower electrode and the first upper electrode;
• a second actuator which has a second fixed end fixed at least at one end to the substrate, which is disposed in parallel with the first actuator, which comprises a second lower electrode, a second lower piezoelectric film formed on the second lower electrode, a second intermediate electrode formed on the second lower piezoelectric film, a second upper piezoelectric film formed on the second intermediate electrode, and a second upper electrode formed on the second upper piezoelectric film, and which can be operated by applying voltages to the second intermediate electrode and at least one of the second lower electrode and the second upper electrode;
• a third actuator which has a third fixed end fixed at least at one end to the substrate, which is disposed across the first actuator from the second actuator and in parallel with the first actuator, which comprises a third lower electrode, a third lower piezoelectric film formed on the third lower electrode, a third intermediate electrode formed on the third lower piezoelectric film, a third upper piezoelectric film formed on the third intermediate electrode, and a third upper electrode formed on the third upper piezoelectric film, and which can be operated by applying voltages to the third intermediate electrode and at least one of the third lower electrode and the third upper electrode;
• and
• an electric circuit element having a first action part connected to the first actuator, a second action part connected to the second actuator, and a third action part connected to the third actuator.