Ultrasonic transducer array and a method for making a transducer array
AssigneeSony Corporation
InventorsPeng Gao, Ching Biing Yeo, Xiaobing Sun, Kanzo Okada
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Abstract
A transducer array comprises a conductive back plate 32, a conductive front plate 33 having openings 62, and a plurality of piezoelectric vibrator elements 31 located in an array between the plates. The vibrator elements 31 are two-layer elements which each include a metal portion 311 and a PZT element 312. These elements 311, 312 are in electrical contact with the respective plates. The vibrator elements 31 are attached to support elements 51 upstanding as part of the back plate 32. The transducer array can be formed as a batch process in which the vibrator elements 31 are formed simultaneously, and then simultaneously attached to the support elements 51.
Claims5
A transducer array comprising:
- (a) a conductive back plate;
- (b) a conductive front plate having openings;
- (c) a plurality of piezoelectric vibrator elements located in an array between the plates, the vibrator elements each including a piezoelectric element and a conductive element,
- wherein each piezoelectric element is in electrical contact with the conductive back plate and each conductive element is in electrical contact with the conductive front plate.
Dependencies are inferred from the claim text.