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US 7,732,984 B2Granted
Piezoelectric actuator, method of manufacturing piezoelectric actuator, and liquid ejection head
AssigneeFUJIFILM Corporation
InventorYasukazu Nihei
Life of this patent
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Abstract
The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering layer.
Claims17
A piezoelectric actuator, comprising:
- a substrate;
- a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness at an operating temperature, said operating temperature occurring during driving of the piezoelectric actuator, said constraint force buffering layer having a higher hardness at a temperature lower than said operating temperature;
- and
- a piezoelectric element which is formed on the constraint force buffering layer,
- wherein the hardness control material is a shape memory polymer of which a glass transition temperature is not greater than a temperature during driving of the piezoelectric actuator.
2 more elements
A piezoelectric actuator, comprising:
- a substrate which is made of a hardness control material having low hardness at an operating temperature, said operating temperature occurring during driving of the piezoelectric actuator, said substrate having a higher hardness at a temperature lower than said operating temperature;
- and a piezoelectric element which is formed on the substrate;
- wherein the hardness control material is a shape memory polymer of which a glass transition temperature is not greater than a temperature during driving of the piezoelectric actuator.
Dependencies are inferred from the claim text.