Back to results
US 7,732,975 B1Granted
Biased gap-closing actuator
AssigneeFormFactor, Inc.
InventorsEric D. Hobbs, Gaetan L. Mathieu
Life of this patent
Estimating the term…
Abstract
A gap-closing actuator includes a stator having one or more first electrodes, a mover having one or more second electrodes interposed among the first electrodes, and a biasing mechanism for applying a non-capacitive bias to the mover for urging the mover to move in a desired direction with respect to the stator. The non-capacitive bias is different from a capacitive force generated between the first and second electrodes when the gap-closing actuator is in operation.
Claims15
A gap-closing actuator comprising:
- a stator having one or more first electrodes;
- a mover having one or more second electrodes interposed among the first electrodes;
- and
- a biasing mechanism for applying a non-capacitive bias to the mover for urging the mover to move in a desired direction with respect to the stator,
- wherein the non-capacitive bias is different from a capacitive force generated between the first and second electrodes when the gap-closing actuator is in operation.
2 more elements
A process for fabricating a gap-closing actuator comprising:
- forming a stator having one or more first electrodes;
- forming a mover having one or more second electrodes interposed among the first electrodes;
- and
- applying a non-capacitive bias to the mover for urging the mover to move in a desired direction with respect to the stator,
- wherein the non-capacitive bias is different from a capacitive force generated between the first and second electrodes when the gap-closing actuator is in operation.
2 more elements
Dependencies are inferred from the claim text.