Electrostatic power generator cell and method of manufacture

A power generator comprising:

• a first pair of coplanar electrodes on a first substrate;
• a first dielectric film over the first pair of coplanar electrodes to form a floor and a sidewall of a chamber;
• a second pair of coplanar electrodes on a second substrate coupled to the first pair of coplanar electrodes, the second pair of coplanar electrodes coated with a second dielectric film to enclose the chamber;
• an electret adjacent to at least one electrode of each pair of coplanar electrodes;
• and
• a high permittivity material occupying a portion of the chamber, the high permittivity material movable relative to the first and second pair of electrodes to vary the capacitance of each of the first and second capacitors.

A power generator comprising:

• a first film having a first region and second region, the second region being parallel to the first region with a chamber and an electret there between;
• a first electrode in the first region adjacent to the electret and a second electrode in the second region, the second electrode parallel to the first electrode;
• and
• a high permittivity material occupying a portion of the chamber, the high permittivity material movable within the chamber to vary the capacitance between the second electrode and the electret.