Gated diode with non-planar source region
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsDa-Wen Lin, Ying-Shiou Lin, Shyh-Wei Wang, Li-Ping Huang, Ying-Keung Leung, Carlos H. Diaz
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsDa-Wen Lin, Ying-Shiou Lin, Shyh-Wei Wang, Li-Ping Huang, Ying-Keung Leung, Carlos H. Diaz
Estimating the term…
A gated-diode semiconductor device or similar component and a method of fabricating the device. The device features a gate structure disposed on a substrate over a channel and adjacent a source and a drain. The top of the source or drain region, or both, are formed so as to be at a higher elevation, in whole or in part, than the bottom of the gate structure. This configuration may be achieved by overlaying the gate structure and substrate with a profile layer that guides a subsequent etch process to create a sloped profile. The source and drain, if both are present, may be symmetrical or asymmetrical. This configuration significantly reduces dopant encroachment and, as a consequence, reduces junction leakage.
A semiconductor device, comprising:
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