Trench MOS type silicon carbide semiconductor device

A trench MOS type silicon carbide (SiC) semiconductor device comprising:

• a first conductivity type semiconductor substrate;
• a first conductivity type drift layer formed on the first conductivity type semiconductor substrate;
• a second conductivity type base layer formed on the first conductivity type drift layer;
• a first conductivity type source layer formed on the second conductivity type base layer, a stripe shaped trench reaching from the surface of the first conductivity type source layer to the first conductivity type drift layer;
• a second conductivity type layer formed on the bottom of the stripe shaped trench;
• a second conductivity type region formed on the second conductivity type layer and on across-the-width side walls of at least a first end of the stripe shaped trench, the second conductivity type region electrically coupling the second conductivity type layer with the second conductivity type base layer;
• and
• a gate oxide film formed in said trench with a gate electrode connected thereto.