Vertical P-N junction device and method of forming same
AssigneeInternational Business Machines Corporation
InventorsBenjamin T. Voegeli, Steven H. Voldman
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AssigneeInternational Business Machines Corporation
InventorsBenjamin T. Voegeli, Steven H. Voldman
Estimating the term…
A P-N junction device and method of forming the same are disclosed. The P-N junction device may include a P-N diode, a PiN diode or a thyristor. The P-N junction device may have a monocrystalline or polycrystalline raised anode. In one embodiment, the P-N junction device results in a raised polycrystalline silicon germanium (SiGe) anode. In another embodiment, the P-N junction device includes a first terminal (anode) including a conductor layer positioned above an upper surface of a substrate and a remaining structure positioned in the substrate, the first terminal positioned over an opening in an isolation region; and a second terminal (cathode contact) positioned over the opening in the isolation region adjacent the first terminal. This latter embodiment reduces parasitic resistance and capacitance, and decreases the required size of a cathode implant area since the cathode contact is within the same STI opening as the anode.
A vertical P-N junction device comprising:
A vertical P-N junction device comprising:
Dependencies are inferred from the claim text.