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AssigneeHitachi High-Technologies Corporation
InventorsTohru Ando, Yasuhiko Nara, Tsutomu Saito, Shinichi Kato, Takeshi Sunaoshi
Estimating the term…
A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.
A semiconductor testing method in which a plurality of cells formed in a semiconductor are displayed on display means based on a sample signal obtained by irradiating the semiconductor on a movable stage with a charged particle beam, and a specific cell is identified,
A semiconductor tester comprising a movable stage for supporting a semiconductor, a charged particle beam irradiation optical system for irradiating the semiconductor on the stage with a charged particle beam, a monitor for displaying, based on a sample signal obtained by irradiating the semiconductor with the charged particle beam, a plurality of cells formed in the semiconductor, and a control unit for controlling the stage, the charged particle beam irradiation optical system, and the monitor, the semiconductor tester identifying a specific cell,
A computer program on a machine-readable medium for making a computer function to control a semiconductor tester comprising a movable stage for supporting a semiconductor, charged particle beam irradiation means for irradiating the semiconductor on the stage with a charged particle beam, display means for displaying, based on a sample signal obtained by irradiating the semiconductor with the charged particle beam, a plurality of cells formed in the semiconductor, and control means for controlling the stage, the charged particle beam irradiation means, and the display means, the semiconductor tester identifying a specific cell, wherein the program is configured to:
A semiconductor testing method in which a plurality of cells formed in a semiconductor are displayed on a display based on a sample signal obtained by irradiating the semiconductor on a movable stage with a charged particle beam, and a specific cell is identified, the method comprising the steps of:
Dependencies are inferred from the claim text.