Back to results
US 7,732,762 B2Granted
Method of inspecting a specimen surface, apparatus and use of fluorescent material
AssigneeNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
InventorsMichiel David Nijkerk, Pieter Kruit
Life of this patent
Estimating the term…
Abstract
The invention relates to a method of inspecting a specimen surface. The method comprises the steps of generating a plurality of primary beams directed towards the specimen surface, focussing the plurality of primary beams onto respective loci on the specimen surface, collecting a plurality of secondary beams of charged particles originating from the specimen surface upon incidence of the primary beams, converting at least one of the collected secondary beams into an optical beam, and detecting the optical beam.
Claims47
Method of inspecting a specimen surface, comprising the steps of
- generating a plurality of primary beams directed towards the specimen surface;
- focussing the plurality of primary beams onto respective loci on the specimen surface;
- collecting a plurality of secondary beams of charged particles originating from the specimen surface upon incidence of the primary beams;
- converting at least one of the collected secondary beams at a plane into an optical beam, the optical beam being imaged through free space, the optical beam traversing at least one of the primary beams onto a plane in which an optical detector is located;
- and
- detecting the optical beam with the optical detector.
3 more elements
Method of inspecting a specimen surface, comprising the steps of:
- generating a plurality of primary beams directed towards the specimen surface;
- focussing the plurality of primary beams onto respective loci on the specimen surface;
- collecting a plurality of secondary beams of charged particles originating from the specimen surface upon incidence of the primary beams;
- converting at least one of the collected secondary beams into an optical beam;
- and
- detecting the optical beam at a location within a volume being traversed by the plurality of primary beams.
3 more elements
Method of inspecting a specimen surface, comprising the steps of:
- generating a plurality of primary beams directed towards the specimen surface;
- focussing the plurality of primary beams onto respective loci on the specimen surface;
- collecting a plurality of secondary beams of charged particles originating from the specimen surface upon incidence of the primary beams;
- converting at least one of the collected secondary beams into an optical beam by means of at least one of a electrochromic material and one or more current detectors driving at least one of a light emitting diode (LED) and a laser;
- and
- detecting the optical beam.
3 more elements
Apparatus for inspecting a specimen surface, comprising
- at least one emitter arranged to emit a plurality of primary beams directed towards the specimen surface;
- focussing means arranged to focus the plurality of primary beams onto respective loci on the specimen surface;
- collecting means for collecting a plurality of secondary beams of charged particles originating from the specimen surface upon incidence of the primary beams;
- converting means for converting at least one of the collected secondary beams into an optical beam, the converting means being configured to convert at least one of the collected secondary beams at a plane into the optical beam;
- and
- detection means for detecting the optical beam, the detection means including an optical detector for detecting the optical beam;
- the optical beam being imaged through free space, the optical beam traversing at least one of the primary beams onto a plane in which the optical detection means is located.
4 more elements
Apparatus for inspecting a specimen surface, comprising:
- one or more emitters arranged to emit one or more primary beams directed towards the specimen surface;
- collecting means for collecting one or more secondary beams of charged particles originating from the specimen surface upon incidence of the one or more primary beams;
- converting means for converting at least one of the collected secondary beams into an optical beam;
- directing means for directing the optical beam towards a detection means, the directing means being integrated in the converting means, the directing means including one or more cavities having reflective walls in the fluorescent material;
- and
- the detection means for detecting the optical beam.
3 more elements
An apparatus for inspecting a specimen surface, comprising:
- one or more emitters arranged to emit one or more primary beams directed towards the specimen surface;
- collecting means for collecting one or more secondary beams of charged particles originating from the specimen surface upon incidence of the one or more primary beams;
- converting means for converting at least one of the collected secondary beams into an optical beam;
- directing means for directing the optical beam towards a detection means, the directing means including a microlens array having a plurality of microlenses, disposed on the fluorescent material, so that the microlenses are arranged to reduce the opening angle of the optical beamlets while maintaining the same amount of light;
- and
- the detection means for detecting the optical beam.
3 more elements
An apparatus for inspecting a specimen surface, comprising:
- one or more emitters arranged to emit one or more primary beams directed towards the specimen surface;
- collecting means for collecting one or more secondary beams of charged particles originating from the specimen surface upon incidence of the one or more primary beams;
- converting means for converting at least one of the collected secondary beams into an optical beam;
- directing means for directing the optical beam towards a detection means, the directing means further including one or more concave mirrors having a relatively small opening, disposed above the one or more cavities, respectively, so that the opening angle of the optical beam is determined by the opening in the mirror;
- and
- the detection means for detecting the optical beam.
3 more elements
An apparatus for inspecting a specimen surface, comprising:
- one or more emitters arranged to emit one or more primary beams directed towards the specimen surface;
- collecting means for collecting one or more secondary beams of charged particles originating from the specimen surface upon incidence of the one or more primary beams;
- converting means for converting at least one of the collected secondary beams into an optical beam;
- directing means for directing the optical beam towards a detection means, the directing means using plasmon coupled scintillation to direct light output from the converting means;
- and
- the detection means for detecting the optical beam.
3 more elements
An apparatus for inspecting a specimen surface, comprising:
- one or more emitters arranged to emit one or more primary beams directed towards the specimen surface;
- collecting means for collecting one or more secondary beams of charged particles originating from the specimen surface upon incidence of the one or more primary beams;
- converting means for converting at least one of the collected secondary beams into an optical beam;
- directing means for directing the optical beam towards a detection means, the directing means including a metal film and the converting means including a layer of fluorescent material, the metal film being deposited on the fluorescent material;
- and
- the detection means for detecting the optical beam.
3 more elements
An apparatus for inspecting a specimen surface, comprising:
- one or more emitters arranged to emit one or more primary beams directed towards the specimen surface;
- collecting means for collecting one or more secondary beams of charged particles originating from the specimen surface upon incidence of the one or more primary beams;
- converting means for converting at least one of the collected secondary beams into an optical beam;
- directing means for directing the optical beam towards a detection means, the directing means is disposed around the one or more emitter;
- and
- the detection means for detecting the optical beam.
3 more elements
Dependencies are inferred from the claim text.