Nickel alloy precision force transducer with strain gauge elements
AssigneeSartorius AG
InventorsTanja Mueck, Volker Relling, Werner Schulze, Michael Steps, Helga Covic
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Abstract
A precision force transducer having a spring element (1) whose load-dependent deflection is converted into an electrical signal by means of strain gauge elements (10). The spring element (1) is made of a precipitation-hardenable nickel-based alloy with a nickel content in the range of 36 to 60 percent and a chromium content in the range of 15 to 25 percent. The strain gauge elements (10) are composed of a polymer-free layered film system. This makes it possible to produce a precision force transducer that features great accuracy, low creep and low moisture sensitivity.
Claims5
A precision force transducer comprising:
- a spring element configured to produce a load-dependent deflection;
- and
- at least one strain gauge element configured to convert the deflection into an electrical signal,
- wherein the spring element is formed of a precipitation-hardenable nickel-based alloy having a nickel content of between 50 and 55 percent and a chromium content of between 17 and 21 percent, and
- wherein the strain gauge element is formed of a polymer-free layered film system,
- the precision force transducer further comprising at least one end piece respectively at least at one end of the spring element, wherein the end piece is formed of a material different from the alloy of the spring element,
- wherein the end piece is welded to the spring element, and
- wherein the spring element is configured as a parallel guide.
A precision force transducer comprising:
- a spring element configured to produce a load-dependent deflection;
- and
- at least one strain gauge element configured to convert the deflection into an electrical signal,
- wherein the spring element is formed of a precipitation-hardenable nickel-based alloy having a nickel content of between 36 and 60 percent and a chromium content of between 15 and 25 percent, and
- wherein the strain gauge element is formed of a polymer-free layered film system,
- the precision force transducer further comprising at least one end piece respectively at least at one end of the spring element, wherein the end piece is formed of a material different from the alloy of the spring element,
- wherein the end piece is welded to the spring element,
- wherein the layered film system for the strain gauge element is sputtered, and
- wherein the layered film system for the strain gauge element sputtered onto the spring element has the following layer sequence:
- insulating film of SiO2 or Al2O3, strain-sensitive film of a ternary NiCr alloy, cover film of SiO2 or Al2O3.
Dependencies are inferred from the claim text.