Method to build robust mechanical structures on substrate surfaces
AssigneeFormFactor, Inc.
InventorsGary W. Grube, Gaetan L. Mathieu, Benjamin N. Eldridge, Chadwick D. Sofield
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Abstract
A robust mechanical structure is provided to prevent small foundation structures formed on a substrate from detaching from the substrate surface. The strengthened structure is formed by plating a foundation metal layer on a seed layer and then embedding the plated foundation structure in an adhesive polymer material, such as epoxy. Components, such as spring probes, can then be constructed on the plated foundation. The adhesive polymer material better assures the adhesion of the metal foundation structure to the substrate surface by counteracting forces applied to an element, such as a spring probe, attached to the plated foundation.
Claims16
A support structure comprising:
- a substrate;
- a metal foundation provided on the substrate and disposed on and entirely above an upper surface of said substrate;
- and
- an adhesive material provided over the substrate contacting sides of the metal foundation,
- wherein the metal foundation comprises a well disposed within the metal foundation.
A support structure comprising:
- a substrate;
- a metal foundation provided on the substrate and disposed entirely on and entirely above an upper surface of said substrate;
- and
- an adhesive material provided over the substrate contacting sides of the metal foundation,
- wherein the metal foundation comprises:
- a first metal seed layer overlying the substrate;
- and
- a second metal layer overlying the first metal seed layer.
A support structure comprising:
- a substrate;
- a metal foundation provided on the substrate;
- and
- an adhesive material provided over the substrate contacting sides of the metal foundation,
- wherein the foundation has a central polygon shape with anchors extending from the central polygon.
A support structure comprising:
- a substrate;
- a metal foundation provided on the substrate;
- a spring probe attached to the metal foundation;
- and
- a dielectric material over the substrate contacting sides of the metal foundation.
A support structure comprising:
- a substrate;
- a metal foundation provided on the substrate and disposed on and entirely above an upper surface of said substrate, wherein the metal foundation comprises a well disposed within the metal foundation;
- and
- an adhesive material provided over the substrate contacting sides of the metal foundation,
- wherein the adhesive material comprises an epoxy filled with a powder to act as a reinforcing agent.
A support structure comprising:
- a substrate;
- a metal foundation provided on the substrate;
- and
- an adhesive material provided over the substrate contacting sides of the metal foundation;
- a wire bonded to the metal foundation;
- and
- a resilient material coating the wire.
Dependencies are inferred from the claim text.