Optical member comprising OD-doped silica glass
AssigneeCorning Incorporated
InventorsDana Craig Bookbinder, Michael Lucien Genier, Lisa Anne Moore
Life of this patent
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Abstract
An optical member comprising OD-doped silica glass, optionally doped with fluorine. The optical member is particularly advantageous for use in connection with radiation having a wavelength shorter than about 248 nm. In certain embodiments the optical member can be advantageously used for wavelength as short as about 157 nm.
Claims22
An optical member having a light incident axis, comprising an OD-doped silica glass having an absorption edge λ(edge) ≦165 nm, wherein the OD-doped silica glass has a ratio of n(OD)/(n(OH)+n(OD)) of higher than about 0.98.
An optical member having a light incident axis, comprising a silica glass doped with OD and fluorine and having an absorption edge λ(edge) ≦165 nm.
An optical member having a light incident axis, comprising an OD-doped silica glass having an absorption edge λ(edge) ≦165 nm, wherein the OD-doped silica glass is doped with D2 at a concentration of [D2], and wherein 1×1015 molecules/cm3 ≦[D2] ≦1×1018 molecules/cm3.
Dependencies are inferred from the claim text.