Thin film array panel and manufacturing method thereof

A method of manufacturing a thin film array panel, the method comprising:

• forming a gate conductor formed on a substrate;
• forming a gate insulating layer on the gate conductor;
• forming a semiconductor layer on the gate insulating layer;
• forming a data conductor at least on the semiconductor layer;
• forming a passivation layer on the semiconductor layer, the passivation layer including a first portion having a contact hole on one of the gate conductor or the data conductor for connection with an external device, a second portion thicker than the first portion, and a third portion disposed between the first portion and the second portion and having an inclined angle smaller than about 45 degrees;
• and
• forming a pixel electrode connected to the drain electrode and a contact assistant connected to either the gate conductor or the data conductor,
• wherein the contact assistant is disposed only on the first portion.