Method for forming light-transmitting regions
AssigneeVisEra Technologies Company Limited
InventorsChieh-Yuan Cheng, Tzu-Han Lin, Pai-Chun Peter Zung
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AssigneeVisEra Technologies Company Limited
InventorsChieh-Yuan Cheng, Tzu-Han Lin, Pai-Chun Peter Zung
Estimating the term…
A method for forming a light-transmitting region comprises providing a support feature. A sacrificial layer is formed over a portion of the support feature, wherein the sacrificial layer comprises an energy-induced swelling material. A light-blocking layer is conformably formed over the support feature to cover the sacrificial layer and the support feature. The support feature, the sacrificial layer, and the light-blocking layer are subjected to an energy source to swell the sacrificial layer until bursting to thereby delaminate a portion of the light-blocking layer from the support feature and leave a light-transmitting region exposed with a portion of the support feature in the light-blocking layer. A gas flow or scrub cleaning force is provided to clean up the light-transmitting region and a top surface of the light-blocking layer remains over the support feature.
A method for forming a light-transmitting region, comprising:
A method for forming an image sensing device, comprising:
A method for forming an image sensing device, comprising:
Dependencies are inferred from the claim text.