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US 7,732,067 B2Granted
Epitaxial layer structures and precursors for topotactic anion exchange oxide films
OwnerMark A. Zurbucheninventor
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Abstract
This invention disclosure describes methods for the fabrication of metal oxide films on surfaces by topotactic anion exchange, and laminate structures enabled by the method. A precursor metal-nonmetal film is deposited on the surface, and is subsequently oxidized via topotactic anion exchange to yield a topotactic metal-oxide product film. The structures include a metal-oxide layer(s) and/or a metal-nonmetal layer(s).
Claims27
A functional laminate structure, comprising:
- a substrate having a surface;
- a crystalline metal-nonmetal layer comprising a metal-nonmetal, the metal-nonmetal comprising metal constituents, wherein
- the metal-nonmetal is selected from the group consisting of:
- ABX3, An+1BnX3n+1, doped substituents thereof, anion-deficient versions thereof, and anion-excess versions thereof;
- and
- a crystalline metal-oxide layer comprising a metal-oxide, the metal-oxide comprising metal constituents, wherein
- the metal-oxide layer is topotactic with said metal-nonmetal layer;
- the metal-oxide is selected from the group consisting of ABO3, An+1BnO3n+1, doped substituents thereof, anion-deficient versions thereof, and anion-excess versions thereof;
- the metal constituents of the metal-oxide layer are those of the metal-nonmetal layer;
- and
- the crystalline metal-nonmetal layer is located between the surface and the metal-oxide layer.
8 more elements
A laminate structure for use as a precursor to a topotactic oxide structure, comprising:
- a substrate having a surface;
- a crystalline metal-nonmetal layer, comprising a metal and a nonmetal, wherein the metal-nonmetal is selected from the group consisting of:
- ABX3, An+1BnX3n+1, doped substituents thereof, anion-deficient versions thereof, and anion-excess versions thereof;
- and
- A comprises a member selected from the group consisting of the lanthanide elements:
- Sc, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu, and combinations, alloys, and doped substituents thereof;
- and
- B comprises a member selected from the group consisting of:
- Al, Ti, V, Nb, Cr, Mo, Mn, Fe, Ru, Go, Rh, Ir, Ni, Pd, Pt, Cu, Zn, Cd, Ga, In, Tl, Pb, Sb, Ho, Er, Tm, Yb, Lu, and combinations thereof;
- and
- X comprises a member from the group consisting of the elements:
- H, C, N, P, S, Cl, Se, Br, Te, and combinations thereof;
- wherein the layer is epitaxial with the surface.
10 more elements
A functional laminate structure, comprising:
- a substrate having a surface;
- a crystalline metal-nonmetal layer comprising a metal-nonmetal, the metal-nonmetal comprising one or more metal constituents,
- wherein the metal-nonmetal is selected from the group consisting of:
- ABX3, An+1BnX3n+1, doped substituents thereof, anion-deficient versions thereof, and anion-excess versions thereof and X comprises a member selected from the group consisting of:
- N, F, S, and combinations thereof;
- and
- a crystalline metal-oxide layer comprising a metal oxide, the metal oxide comprising one or more metal constituents, wherein
- the metal-oxide layer is epitaxial with said metal-nonmetal layer;
- the metal oxide is selected from the group consisting of ABO3, An+1BnO3n+1, doped substituents thereof, anion-deficient versions thereof, and anion-excess versions thereof;
- and
- the crystalline metal-nonmetal layer is located between the surface and the metal-oxide layer.
8 more elements
Dependencies are inferred from the claim text.