Back to results
US 7,732,019 B2Granted
Solution spray apparatus and solution spray method
AssigneeCasio Computer Co., Ltd.
InventorsSatoru Shimoda, Tomoyuki Shirasaki
Life of this patent
Estimating the term…
Abstract
A solution spray apparatus includes a nozzle which sprays a droplet of a solution such as EL solution, a heater is provided on the nozzle to heat the solution in the nozzle to a temperature lower than a boiling point of the solution in the nozzle, so that the droplet of the heated solution is ejected from the spray to an object.
Claims18
A solution spray apparatus comprising:
- a table which supports a substrate having an electrode;
- at least one nozzle which sprays at least one droplet of a solution containing an EL material and a solvent onto the electrode of the substrate;
- a heating-insulating unit which heats the table to vaporize the solvent and insulates the table;
- a driving device which moves the table;
- and
- a heat insulator which is interposed between the heating-insulating unit and the driving device.
3 more elements
A spraying method comprising:
- heating a solution containing an EL material and a solvent;
- supplying the heated solution to a nozzle;
- spraying the heated solution from the nozzle onto an electrode of a substrate on a table;
- heating the table to vaporize the solvent by a heating-insulating unit;
- and
- moving the table by a driving device;
- wherein the driving device is thermally insulated from the heating-insulation unit by a heat insulator interposed between the heating-insulating unit and the driving device.
4 more elements
A spraying method comprising:
- heating a solution containing an EL material and a solvent in a nozzle to a temperature that is lower than a boiling point of the solution;
- spraying the heated solution from the nozzle onto an electrode of a substrate on a table;
- heating the table to vaporize the solvent by a heating-insulating unit;
- and
- moving the table by a driving device;
- wherein the driving device is thermally insulated from the heating-insulating unit by a heat insulator interposed between the heating-insulating unit and the driving device.
3 more elements
A spraying method comprising:
- detecting a temperature of a nozzle;
- controlling a temperature of a solution containing an EL material and a solvent in the nozzle to fall within a predetermined temperature range, based on the detected temperature of the nozzle;
- spraying the solution toward an electrode of a substrate on a table from the nozzle;
- heating the table to vaporize the solvent by a heating-insulating unit;
- and
- moving the table by a driving device;
- wherein the driving device is thermally insulated from the heating-insulating unit by a heat insulator interposed between the heating-insulating unit and the driving device.
4 more elements
An EL layer forming apparatus comprising:
- a table which supports a substrate having an electrode;
- at least one nozzle which sprays at a solution containing an EL material and a solvent toward the electrode of the substrate;
- a heating unit which heats the table to vaporize the solvent;
- a driving device which moves the table;
- and
- a heat insulator which is interposed between the heating unit and the driving device.
3 more elements
An EL layer forming apparatus comprising:
- a table which supports a substrate;
- at least one nozzle which sprays a solution containing an EL material and a solvent toward an electrode of the substrate;
- a heating unit which heats the table to dry the solution by vaporizing the solvent;
- a driving device which moves the table;
- and
- a heat insulator which is interposed between the heating unit and the driving device.
3 more elements
A method of forming an EL layer comprising:
- spraying a solution containing an EL material and a solvent toward an electrode of a substrate which is supported on a table;
- heating the table to vaporize the solvent to deposit the EL material by a heating unit;
- and
- moving the table by a driving device;
- wherein the driving device is thermally insulated from the heating unit by a heat insulator interposed between the heating unit and the driving device.
2 more elements
Dependencies are inferred from the claim text.