Bank forming method, wiring pattern forming method, electro-optical device, and electronic apparatus

#1. Field of Invention

#Aspects of the invention can relate to a bank forming method of partitioning a predetermined area on a base member, a wiring pattern forming method using the banks, an electro-optical device, and an electronic apparatus.

#2. Description of Related Art

#The invention will be described with reference to the accompanying drawings, wherein like numerals reference like elements, and wherein:

#FIG. 1 is a schematic diagram illustrating an exemplary embodiment of a bank forming apparatus used in a bank forming method according to the invention;

#FIG. 2 is a schematic diagram illustrating an exemplary embodiment of the bank forming method according to the invention;

#Hereinafter, an exemplary bank forming method according to the invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic diagram illustrating an exemplary embodiment of a bank forming apparatus used in the bank forming method according to the invention. In FIG. 1, the bank forming apparatus 10 can include a laser source 11 for radiating a laser beam having a predetermined wavelength and a stage 12 for supporting a base member 1 which is a processing target. A sublimation layer 2 containing a sublimation material is formed on the top surface of the base member 1. The laser source 11 and the stage 12 for supporting the base member 1 are placed within a chamber 14. A suction apparatus 13 for sucking gas inside the chamber 14 is connected to the chamber 14. In this exemplary embodiment, a near-infrared semiconductor laser (with a wavelength of 830 nm) is used as the laser source 11.

#In the following description, it is assumed that a predetermined direction in a horizontal plane is an X axis direction, a direction perpendicular to the X axis direction in the horizontal plane is a Y axis direction, and a direction (a vertical direction) perpendicular to the X axis direction and the Y axis direction is a Z axis direction.

#The stage 12 is provided to be movable in the X axis direction and the Y axis direction while supporting the base member 1, and the base member 1 is movable with respect to the light beam radiated from the light source 11 through movement of the stage 12. Further, the stage 12 is movable in the Z axis direction. Here, an optical system not shown is disposed between the light source 11 and the base member 1 supported by the stage 12.