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US 7,731,930 B2Granted
Carbon nanotube assembly and manufacturing method thereof
AssigneeNikon Corporation
InventorsYusuke Taki, Kiyoaki Shinohara
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AssigneeNikon Corporation
InventorsYusuke Taki, Kiyoaki Shinohara
Estimating the term…
A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300° C. to 400° C. in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450° C. is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.
A carbon nanotube assembly directly grown on a substrate, wherein a proportion of double-walled carbon nanotubes to carbon nanotubes contained in the assembly is 70% or more.
A carbon nanotube assembly directly grown on a substrate, wherein a proportion of triple-walled carbon nanotubes to carbon nanotubes contained in the assembly is 50% or more.
A carbon nanotube assembly directly grown on a substrate, wherein a proportion of quad-walled carbon nanotubes to carbon nanotubes contained in the assembly is 50% or more.
A carbon nanotube assembly directly grown on a substrate, wherein a proportion of quint-walled carbon nanotubes to carbon nanotubes contained in the assembly is 50% or more.
Dependencies are inferred from the claim text.