Back to results
US 7,731,862 B2Granted
Dry etching method, fine structure formation method, mold and mold fabrication method
AssigneePanasonic Corporation
InventorsHideo Nakagawa, Masaru Sasago, Tomoyasu Murakami
Life of this patent
Estimating the term…
Abstract
A substance including tungsten and carbon is etched by using plasma. The plasma is generated from a mixed gas of a gas including a fluorine atom, a gas including a nitrogen atom and a gas including a hydrocarbon molecule.
Claims27
A dry etching method comprising:
- placing a substance including tungsten and carbon in a reaction chamber;
- after placing the substrate, generating plasma from a mixed gas comprising a gas including fluorine, a gas including nitrogen and a gas consisting of at least one of C2H4, C2H6, C4H8 and a saturated hydrocarbon molecule;
- dry etching the substance by using the plasma;
- and
- wherein said saturated hydrocarbon molecule has carbon-carbon single bond, and consists of hydrogen and carbon.
2 more elements
A fine structure formation method comprising:
- forming a mask pattern on a substance including tungsten and carbon;
- and
- with said mask pattern used as an etching mask, dry etching said substance by using plasma generated from a mixed gas comprising a gas including fluorine, a gas including nitrogen and a gas consisting of at least one of C2H4, C2H6, C4H8 and a saturated hydrocarbon molecule
- wherein said saturated hydrocarbon molecule has carbon-carbon single bond, and consists of hydrogen and carbon.
1 more element
A mold fabrication method comprising:
- placing a substance including tungsten and carbon in a reaction chamber;
- after placing the substrate, generating plasma from a mixed gas comprising a gas including fluorine, a gas including nitrogen and a gas consisting of at least one of C2H4, C2H6, C4H8 and a saturated hydrocarbon molecule;
- dry etching the substance by using the plasma to process said substance into a mold;
- and
- wherein said saturated hydrocarbon molecule has carbon-carbon single bond, and consists of hydrogen and carbon.
2 more elements
Dependencies are inferred from the claim text.