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US 7,731,802 B2Granted
Methods for transitioning a fluid meniscus to and from surfaces of a substrate
AssigneeLam Research Corporation
InventorCarl Woods
Life of this patent
Estimating the term…
Abstract
Methods for processing a substrate with a fluid meniscus are provided. One method includes positioning a transition surface substantially coplanar to a substrate surface. The transition surface is defined to be adjacent to an edge of the substrate. And, moving a fluid meniscus between the transition surface and the substrate surface.
Claims10
A method for processing a substrate, comprising:
- positioning a transition surface substantially coplanar to a substrate surface, the transition surface being adjacent to an edge of the substrate;
- generating a first fluid meniscus through a first proximity head;
- generating a second fluid meniscus through a second proximity head, the first fluid meniscus and the second fluid meniscus generate a fluid meniscus;
- and
- moving a fluid meniscus onto the transition surface and then onto the substrate, such that the first fluid meniscus of the fluid meniscus moves onto a first side of the substrate and the second fluid meniscus of the fluid meniscus moves onto a second side of the substrate.
2 more elements
A method for processing a substrate, comprising:
- positioning a transition surface substantially coplanar to a substrate surface, the transition surface being adjacent to an edge of the substrate;
- and
- positioning a first proximity head over a second proximity head, such that a fluid meniscus is generated between the first proximity head and the second proximity head, the fluid meniscus generated by supplying fluids to each of the first and second proximity heads and simultaneously removing fluids from the first and second proximity heads, such that the fluid meniscus remains stable between the first and second proximity heads;
- and
- moving a fluid meniscus over the transition surface and onto the substrate surface, the first proximity head and the second proximity head placed at opposite sides of the transition surface and the substrate, such that when the first and second proximity heads are over the transition surface, the fluid meniscus is between the respective side of the transition surface and the first and second proximity heads, and when the first and second proximity heads are over the substrate, the fluid meniscus is between the respective side of the substrate and the first and second proximity heads;
- whereby the fluid meniscus is configured to move between the transition surface and the surface of the substrate, defining a time when the fluid meniscus moves between a gap defined between the transition surface and the substrate.
3 more elements
Dependencies are inferred from the claim text.