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US 7,731,572 B2Granted
CMP head
AssigneeUnited Microelectronics Corp.
InventorsChi-Min Yu, Chi-Chih Chuang, Yu-Fang Chien, Hui-Shen Shih
Life of this patent
Estimating the term…
Abstract
A CMP head includes a membrane support and a membrane. The membrane support is disk-shaped, having an origin and a radius R. The membrane support has at least a ventilator disposed in a central region within the range between origin and (⅔) R, and at least a diversion opening disposed in a peripheral region within the range between (⅔) R and R. The membrane includes a disk-shaped part disposed on the first surface of the membrane support, and an annular part surrounding the annular sidewall of the membrane support.
Claims35
A CMP head, comprising:
- a membrane support substantially being disk-shaped having a first surface, a second surface, and an annular sidewall between the first surface and the second surface, the second surface further comprising a clamping groove, the membrane support comprising at least a ventilator and at least a diversion opening, wherein the membrane support has an origin and a radius R, the membrane support comprises a central region within a round region between the origin and ⅔ R, and a peripheral region within a ring region between ⅔ R and R, the ventilator is disposed in the central region, the diversion opening is disposed in the peripheral region;
- and the annular part of the membrane and the annular sidewall of the membrane support form a gap so that the annular part of the membrane and the annular sidewall of the membrane support are not in contact;
- and
- a membrane supported by the membrane support, and the membrane comprises:
- a disk-shaped part disposed on the first surface of the membrane support;
- an annular part surrounding the annular sidewall of the membrane support;
- and
- a clamping flange engaged in the clamping groove.
5 more elements
A CMP head, comprising:
- a membrane support adapted to support a membrane, the membrane support substantially being disk-shaped having a first surface, a second surface, and an annular sidewall between the first surface and the second surface, the membrane support comprising at least a ventilator, at least a diversion opening, and a plurality of screw holes, wherein the membrane support comprises a central region and a peripheral region, the ventilator is disposed in the central region, the diversion opening and the screw holes are disposed in the peripheral region, and the membrane support is thicker in the peripheral region than in the central region;
- a membrane comprising,
- a disk-shaped part disposed on the first surface of the membrane support;
- an annular part surrounding the annular sidewall of the membrane support;
- and
- a clamping flange;
- wherein the second surface further comprises a clamping groove, the clamping flange is engaged in the clamping groove, and the annular part of the membrane and the annular sidewall of the membrane support form a gap so that the annular part of the membrane and the annular sidewall of the membrane support are not in contact;
- a support pad disposed between the membrane support and the membrane, and the support pad comprising a plurality of holes corresponding to the ventilator and the diversion opening.
5 more elements
A CMP head, comprising:
- a membrane support comprising:
- a support disk having a first surface and a second surface;
- and
- a support sidewall surrounding the support disk, the support sidewall having a C-shaped cross-section comprising a first supporting part structurally connected to a rim of the second surface of the support disk and substantially perpendicular to the second surface, and a second supporting part structurally connected to the first supporting part, the second supporting part extending inwardly and substantially parallel to the second surface, wherein the support disk further comprises at least a ventilator and at least a diversion opening penetrating the support disk, and the diversion opening is disposed corresponding to the second supporting part of the support sidewall;
- and
- a membrane supported by the membrane support.
3 more elements
A CMP head, comprising:
- a membrane support substantially being disk-shaped having a first surface, a second surface, and an annular sidewall between the first surface and the second surface, and
- a membrane comprising:
- a disk-shaped part disposed on the first surface of the membrane support;
- and
- an annular part surrounding the annular sidewall of the membrane support;
- wherein the second surface further comprises a clamping groove, the membrane further comprises a clamping flange engaged in the clamping groove, and the annular part of the membrane and the annular sidewall of the membrane support form a gap so that the annular part of the membrane and the annular sidewall of the membrane support are not in contact.
3 more elements
Dependencies are inferred from the claim text.