Microelectronic contact structure
AssigneeFormFactor, Inc.
InventorsGary W. Grube, Gaetan L. Mathieu, Alec Madsen
Life of this patent
Estimating the term…
Abstract
A probing apparatus can include a plurality of contact probes, which can be of a type that is disposed along an axis. Each contact probe can include a contact portion, a base portion, and resilient portion. Multiple arms can form the resilient portion, which can be disposed between the contact portion and the base portion. The contact probes can be configured to twist when compressed. The probing apparatus can also include a substrate with through holes, and the contact probes can be inserted into the through holes. The resilient portion of each of the contact probes can bias the contact portion such that at least a portion of the contact portion extends out of a through hole.
Claims13
A probing apparatus comprising:
- a plurality of contact probes of a type disposed along an axis, each of the contact probes comprising:
- a contact portion;
- a base portion;
- and
- a resilient portion disposed between the contact portion and the base portion, the resilient portion comprising a plurality of arms;
- and
- a substrate having through holes into which the plurality of contact probes are inserted, the resilient portion of each of the contact probes biasing the contact portion such that at least a portion of the contact portion extends out of a through hole,
- wherein the through holes are threaded, and the contact portion of each of the contact probes further comprises a thread engaging structure that engages the threading of the through holes in a manner that causes the contact portion to rotate with respect to the base portion when the contact probe is compressed.
A probing apparatus comprising:
- a plurality of contact probes of a type disposed along an axis, each of the contact probes comprising:
- a plurality of laminated structural layers;
- a contact portion defined in all the structural layers;
- a base portion defined in all the structural layers;
- and
- a resilient portion disposed between the contact portion and the base portion, the resilient portion comprising a plurality of arms defined in fewer than all the plurality of layers;
- and
- a substrate having through holes into which the plurality of contact probes are inserted, the resilient portion of each of the contact probes biasing the contact portion such that at least a portion of the contact portion extends out of a through hole, wherein each of the through holes has a uniform diameter.
Dependencies are inferred from the claim text.