Vacuum pump control device and vacuum device

A vacuum device that has a plurality of exhaust channels with opening and closing valves to a vacuum pump, and is evacuated by the vacuum pump, characterized in that the vacuum pump includes a vacuum pump controller, the vacuum pump controller comprising:

• a condition setting part configured to preset a relationship between a plurality of combinations of opening or closing states of a plurality of valves and corresponding values of a rotational speed of the vacuum pump, the valves being provided to corresponding exhaust channels between the vacuum device and the vacuum pump;
• a control part configured to receive external signals indicating the opening or closing states of the valves, and to read out from the condition setting part and output one of the values of the rotational speed of the vacuum pump corresponding in the preset relationship to one of the combinations of the opening or closing states of the valves corresponding to the external signals;
• and
• an inverter configured to control the rotational speed of the vacuum pump to the one of the values output from the control part based on the preset relationship.