Sub-mount for mounting optical component, manufacturing method thereof, and light transmission and reception module

A light transmission and reception module, comprising:

• an optical waveguide film formed with an optical waveguide;
• a light transmitting section having a light emitting element and a sub-mount for holding the light emitting element, and holding one end of the optical waveguide film on the sub-mount so that light emitted from the light emitting element is coupled with an incident end surface of the optical waveguide;
• and
• a light detecting section having a light detecting element and a sub-mount for holding the light detecting element, and holding the other end of the optical waveguide film on the sub-mount so that light emitted from an emission end surface of the optical waveguide is detected by the light detecting element;
• wherein,
• each sub-mount includes:
• an upper planar surface
• a first recess for embedding and mounting the corresponding one of the light emitting element and the light detecting element, and the optical waveguide film, the first recess being recessed in a first direction with respect to the upper planar surface and having a mounting surface on which the optical waveguide film is mounted, the mounting surface being formed in a bottom surface of the first recess, and the first recess having one or more side walls, at least one of the side walls being tapered;
• and
• a second recess formed in the mounting surface of the first recess and recessed in the first direction from the mounting surface, the second recess fitting and holding the corresponding one of the light detecting element and the light emitting element below the bottom surface of the first recess.

A manufacturing method of a sub-mount for mounting an optical component including at least one of a light emitting element and a light detecting element, and an optical waveguide film, and the sub-mount having an upper planar surface, the method comprising:

• producing a mold for duplication by making a master mold of the sub-mount by forming projections and recesses including a first recess and a second recess by performing anisotropic etching on a silicon monocrystal substrate having a plane cut out on a surface, applying or pouring liquid silicone rubber into the master mold, and separating the cured silicone rubber from the master mold;
• filling a curable material into the mold for duplication;
• curing the filled curable material;
• and
• separating the cured curable material from the mold for duplication, wherein
• the first recess is recessed in a first direction with respect to the upper planar surface and has a mounting surface on which the optical waveguide film is mounted, the mounting surface being formed in a bottom surface of the first recess, and the first recess further has one or more side walls, and
• a second recess formed in the mounting surface of the first recess and recessed in the first direction from the mounting surface, the second recess fits and holds the at least one of the light detecting element and the light emitting element below the bottom surface of the first recess.