Piezoelectric element, actuator device, liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsMasato Shimada, Xin-Shan Li
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Abstract
A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layer 70 disposed on the lower electrode film, a upper electrode film 80 disposed on the piezoelectric layer 70, wherein the piezoelectric layer 70 is formed of a plurality of columnar grains 70a, and the upper electrode film 80 conforms to the surface shape of each of the grains 70a of the piezoelectric layer 70.
Claims8
A piezoelectric element comprising a lower electrode film disposed on a substrate, a piezoelectric layer disposed on the lower electrode film, and an upper electrode film disposed on the piezoelectric layer, wherein the piezoelectric layer is formed of columnar grains, and the upper electrode film conforms to the surface shape of each of the grains of the piezoelectric layer.
Dependencies are inferred from the claim text.