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US 7,731,337 B2Granted
High efficiency heating resistor comprising an oxide, liquid ejecting head and apparatus using the same
AssigneeKorea Advanced Institute of Science and Technology
InventorsSang-Won Kang, Se-Hun Kwon
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Abstract
The present invention is directed to a heating resistor including a conducting oxide having an electric conductivity and a nonconducting oxide having insulation or nonconductivity, liquid ejecting heads and apparatus comprising the heating resistors.
Claims12
A heating resistor comprising a conducting oxide (AOx) having an electric conductivity and a nonconducting oxide (BOy) having insulation or nonconductivity, wherein the conducting oxide (AOx) has a temperature coefficient of a resistance (TCR) of about (+)500 ppm/K to (−)500 ppm/K.
A substrate for a liquid ejecting head comprising:
- (a) a silicon substrate layer;
- (b) a heating resistor deposited thereon, wherein the heating resistor comprises a conducting oxide (AOx) having an electric conductivity and a nonconducting oxide (BOy) having insulation or nonconductivity, wherein the heating resistor is capable of generating a thermal energy in response to an electric signal, and wherein the conducting oxide (AOx) has a temperature coefficient of a resistance (TCR) of about (+)500 ppm/K to (−)500 ppm/K;
- and
- (c) an electrode layer suitable for supplying an electric signal to the heating resistor.
1 more element
Dependencies are inferred from the claim text.