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US 7,731,161 B2Granted
Devices, systems, and methods for carbonation of deionized water
AssigneeMKS Instruments, Inc.
InventorsJohannes Seiwert, Ulrich Brammer, Christiane Gottschalk, Joachim Lohr
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Abstract
Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.
Claims22
A system for carbonation of deionized water comprising:
- a) a deionized water source;
- b) a carbon dioxide gas source;
- c) a contactor in fluid communication with the water source and the carbon dioxide gas source, the contactor generating carbonated deionized water and having an outlet for outputting the carbonated deionized water;
- d) at least one sensor in fluid communication with the outlet for measuring flow rate and temperature of the carbonated deionized water;
- and
- e) a feed-forward control in communication with the at least one sensor and the carbon dioxide gas source for determining an amount of carbon dioxide gas the carbon dioxide gas source supplies to the contactor such that a specific conductivity of the carbonated deionized water is generated in the contactor, wherein the determination is based on the measured flow rate and temperature.
3 more elements
A method of generating carbonated deionized water comprising:
- a) supplying deionized water to a contactor;
- b) supplying carbon dioxide gas to the contactor;
- c) sensing, with at least one sensor, flow rate and temperature of the carbonated deionized water generated in the contactor and exiting via a contactor outlet;
- d) determining an amount of carbon dioxide gas to supply to the contactor such that a specific conductivity of the carbonated deionized water is generated by the contactor with a feed-forward control in communication with the at least one sensor and the supply of carbon dioxide gas, wherein the determination is based on the sensed flow rate and temperature;
- e) supplying the determined amount of carbon dioxide to the contactor with the feed-forward control;
- and
- f) flowing the carbonated deionized water of a specified conductivity from the contactor.
4 more elements
Dependencies are inferred from the claim text.