Semiconductor wafer lifter
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYang Cheng Hung, Kuo Liang Lu, Tseng Wen Song, Chen Peir Horng
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Abstract
A novel semiconductor wafer lifter is disclosed for handling wafers during wet bench processing. In particular, the lifter has a plurality of holes formed in its vertical support surface to allow cleaning or rinsing fluid to flow through the vertical support instead of around its sides. These holes facilitates a constant flow of fluid across the wafer during recirculation of the tank contents during etching and rinsing operations, thus ensuring more even etching of all wafers and minimizing the deposition of particulate matter on wafer surfaces.
Claims12
A semiconductor wafer handling device, comprising:
- a first process tank having a fluid supply line for supplying fluid to the tank;
- a lift control apparatus;
- a lifting member positionable within the process tank using the lift control apparatus, the lifting member comprising a horizontal wafer engaging portion for engaging a semiconductor wafer and a vertical lifting portion for engaging the lift control apparatus, the vertical lifting portion having a front surface and a back surface, the horizontal wafer engaging portion and the vertical lifting portion oriented such that a side surface of a semiconductor wafer engaged by the horizontal wafer engaging portion is positioned adjacent to, and parallel with, the front surface of the vertical lifting portion, wherein at least one fluid-flow bore is disposed within the vertical lifting portion in communication with said front and back surfaces;
- wherein when the lifting member is positioned within the tank and fluid is supplied to the tank via the fluid supply line, the fluid is movable through the fluid-flow bore to contact the side surface of the semiconductor wafer;
- and
- wherein the fluid-flow bore has a bore axis oriented substantially non-perpendicular to at least one of the front and back surfaces of the lifting member.
A semiconductor wafer handling device, comprising:
- a fluid process tank;
- a fluid circulation loop for supplying fluid to the fluid process tank;
- a lift control apparatus;
- a wafer lifter comprising a horizontal wafer support portion and a vertical wafer lifting portion, the horizontal wafer support portion being configured to engage a plurality of semiconductor wafers, the vertical wafer lifting portion connected to the lift control apparatus for moving the wafer lifter with respect to the fluid process tank, the horizontal wafer engaging portion and the vertical lifting portion oriented such that a side surface of a semiconductor wafer engaged by the horizontal wafer support portion is positioned adjacent to, and parallel with, the front surface of the vertical wafer lifting portion, the vertical lifting portion having a through-bore disposed within the lifting portion, the through-bore being in communication with front and back surfaces of the lifting portion;
- wherein the fluid circulation loop supplies fluid to the fluid process tank, and the fluid is movable through the bore to contact the side surface of the semiconductor wafer;
- and
- wherein the through-bore has a bore axis oriented substantially non-perpendicular to at least one of the front and back surfaces of the lifting portion.
Dependencies are inferred from the claim text.