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US 7,730,783 B2Granted
Acceleration sensor
AssigneeRobert Bosch GmbH
InventorsJohannes Classen, Markus Heitz, Lars Tebje, Fouad Bennini
Life of this patent
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Abstract
An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.
Claims14
An acceleration sensor, comprising:
- a substrate having a surface;
- a plurality of springs, each of the springs including at least two flexible bending bars that are interconnected via crosspieces;
- and
- a seismic mass suspended on the springs above the substrate, the seismic mass being deflectable in a direction perpendicular to the surface of the substrate.
1 more element
Dependencies are inferred from the claim text.