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US 7,727,055 B2Granted
Flexible membrane for carrier head
AssigneeApplied Materials, Inc.
InventorsSteven M. Zuniga, Andrew J. Nagengast, Jeonghoon Oh
Life of this patent
Estimating the term…
Abstract
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
Claims16
A flexible membrane, comprising:
- a main portion with a lower surface to provide a substrate-mounting surface;
- an outer annular portion extending from the outer edge of the main portion;
- and
- a plurality of concentric annular flaps connected to the main portion to divide a volume above the main portion into a plurality of chambers when the flexible membrane is secured to a carrier head;
- wherein a first of the plurality of concentric annular flaps includes a laterally extending section and a vertically extending section connecting the laterally extending section to the main portion and a second of the plurality of concentric annular flaps includes a laterally extending section and a diagonally extending section connecting the laterally extending section to the main portion;
- and
- wherein a juncture between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion, the peripheral edge hinge having rounded inner and outer surfaces and configured to be compliant.
4 more elements
A flexible membrane, comprising:
- a main portion with a lower surface to provide a substrate-mounting surface;
- an outer annular portion extending from the outer edge of the main portion;
- and
- a plurality of concentric annular flaps connected to the main portion to divide a volume above the main portion into a plurality of chambers when the flexible membrane is secured to a carrier head, wherein a first of the plurality of concentric annular flaps includes a laterally extending section and a vertically extending section connecting the laterally extending section to the main portion and a second of the plurality of concentric annular flaps includes a laterally extending section and a diagonally extending section connecting the laterally extending section to the main portion, wherein the laterally extending section has a smaller thickness than the vertically extending section of the first of the plurality of concentric annular flaps.
1 more element
Dependencies are inferred from the claim text.