System and method for non-intrusive thermal monitor
AssigneeEntegris, Inc.
InventorsMarc Laverdiere, Robert F. McLoughlin, Michael Clarke, Dale Maenke, Wiley James Wilkinson
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AssigneeEntegris, Inc.
InventorsMarc Laverdiere, Robert F. McLoughlin, Michael Clarke, Dale Maenke, Wiley James Wilkinson
Estimating the term…
Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
A non-intrusive thermal (NIT) monitor, comprising:
A system for non-intrusive thermal monitoring, comprising:
A method for non-intrusive thermal (NIT) monitoring of a fluid, comprising:
A method for isolating components of a non-intrusive thermal (NIT) monitor from chemicals, comprising:
Dependencies are inferred from the claim text.