Droplet ejection apparatus
AssigneeSeiko Epson Corporation
InventorTakahito Sanekata
Life of this patent
Estimating the term…
Abstract
A droplet ejection apparatus includes: a base; a plotting system having a droplet ejection head that ejects functional liquid as a droplet, a carriage that holds the droplet ejection head, and a stage that holds a work at which the droplet is plotted; and an optical system having a light source that outputs a laser beam and an optical path, which is constituted between the light source and the droplet and through which the laser beam passes to irradiate the droplet; wherein: the plotting system and the optical system are established on the base sharing the upper surface of the base as a reference surface, and pattern is plotted and fixed through cooperation control of both systems.
Claims18
A droplet ejection apparatus, comprising:
- a base;
- a plotting system having a droplet ejection head that ejects functional liquid as a droplet, a carriage that holds the droplet ejection head, and a stage that holds a work at which the droplet is plotted;
- an optical system having a light source that outputs a laser beam and an optical path, which is constituted between the light source and the droplet and through which the laser beam passes to irradiate the droplet;
- and
- a protection cover that protects the droplet ejection head from the laser beam;
- wherein:
- the plotting system and the optical system are established on the base sharing the upper surface of the base as a reference surface, and pattern is plotted and fixed through cooperation control of both systems;
- the optical path includes a third optical path that is substantially parallel to the stage through which the laser beam is irradiated on the droplet horizontally against the stage;
- a side surface of the protection cover is usable as a plane surface for verification of a laser spot position when adjusting the path of the third optical path;
- and
- the droplet is irradiated in midair, before contacting the work.
A droplet ejection apparatus, comprising:
- a base;
- a plotting system having a droplet ejection head that ejects functional liquid as a droplet, a carriage that holds the droplet ejection head, and a stage that holds a work at which the droplet is plotted;
- an optical system having a light source that outputs a laser beam and an optical path, which is constituted between the light source and the droplet and through which the laser beam passes to irradiate the droplet;
- and
- a first electronic camera on the base used to align the work with the plotting system and a second electronic camera used to align the plotting system with the optical system;
- wherein:
- the plotting system and the optical system are established on the base sharing the upper surface of the base as a reference surface, and pattern is plotted and fixed through cooperation control of both systems.
Dependencies are inferred from the claim text.