Fluid controller

A fluid control apparatus comprising a plurality of lines arranged in parallel on a base member and having inlets, as well as outlets, facing toward the same direction, each of the lines comprising a plurality of fluid control devices arranged in an upper stage and a plurality of block coupling members arranged in a lower stage, the fluid control apparatus being characterized in that each of the lines is mounted on a line support member removably attached to the base member, the line support member having a heater insertion bore formed therein and extending longitudinally thereof, a sheath heater being inserted into the bore without insulating material, wherein each of the coupling members is slidably mounted on the line support member, and each of the fluid control devices is mounted on at least two adjacent coupling members;

• the base member in the form of a frame comprising a plurality of lateral rails the main axis of which extends in a direction orthogonal to the lines.

A fluid control apparatus comprising a plurality of lines arranged in parallel on a base member and having inlets, as well as outlets, facing toward the same direction, each of the lines comprising a plurality of fluid control devices arranged in an upper stage and a plurality of block coupling members arranged in a lower stage, the fluid control apparatus being characterized in that each of the lines is mounted on a line support member removably attached to the base member, the line support member having a heater insertion bore formed therein and extending longitudinally thereof, a sheath heater being inserted into the bore, wherein the base member has a plurality of lateral rails made of a nonmetallic material and the main axis of which extends in a direction orthogonal to the lines, the line support member of each of the lines being mounted on the base member slidably in a lateral direction;

• wherein the clip is made from a thin metal plate of inverted U-shape, the clip having a top wall having a shortened front-to-rear width so that there is a space for positioning the top wall on each of the front and rear sides of the controller.

A fluid control apparatus comprising a plurality of lines arranged in parallel on a base member and having inlets, as well as outlets, facing toward the same direction, each of the lines comprising a plurality of fluid control devices arranged in an upper stage and a plurality of block coupling members arranged in a lower stage, the fluid control apparatus being characterized in that at least one of the lines is provided on each of opposite sides thereof with a tape heater, a tape heater holding clip being of an inverted U-shape with flat opposed walls and being removably attached to the tape heater, a space for positioning the tape heater holding clip therein being provided in each of locations between adjacent fluid control devices, the tape heaters being held from opposite sides thereof to block bodies of the fluid control devices with a resilient force acting to reduce the spacing between the opposed walls of the clip, the line provided with the heaters being mounted on a line support member removably attached to the base member;

• wherein the clip is made from a thin metal plate of inverted U-shape, the clip having a top wall having a shortened front-to-rear width so that there is a space for positioning the top wall on each of the front and rear sides of the controller.