Integrated sensor for airfoils of aircraft, particularly of airplanes and helicopters, as well as rotor blades and airplane airfoil

A sensor for an airfoil of aircraft, comprising:

• a sensor capsule having a capsule floor, a protective cover, and a capsule wall extending between the floor and the cover;
• a measuring element, situated in an interior of the sensor capsule, for measuring an environmental parameter and providing signals;
• contacts in the sensor capsule to relay the signals provided between the measuring element and contacts in the capsule floor;
• external contact elements situated on the bottom of the capsule floor and electrically connected to the contacts in the capsule floor;
• a capsule carrier having a structure which is integratable in an airfoil of an aircraft, for receiving and removably attaching the sensor capsule;
• and
• contact elements disposed in the capsule carrier for electrically connecting the external contact elements to the capsule carrier;
• wherein the measuring element comprises at least two wafers bonded to one another;
• the wafers are shaved to form a cavity;
• and the cavity is sealed by a diaphragm.