Device, method and program for inspecting microstructure

A microstructure inspection device for evaluating a property of at least one microstructure having a movable part formed on a substrate, comprising:

• a sound wave generation unit for outputting a sound wave to said microstructure in a test, said sound wave generation unit including a plurality of sound sources each outputting said sound wave, and an adjustment unit for adjusting a composite wave to serve as a predetermined test sound wave, said composite wave being composed of sound waves output from said plurality of sound sources;
• and
• an evaluation unit for detecting how said movable part of said microstructure moves in response to said test sound wave, and for evaluating said property of said microstructure from how said movable part moves, as detected, wherein:
• said plurality of sound sources include N sound sources, each outputting said sound wave to arrive at said movable part concurrently, and to do so,
• said plurality of sound sources are driven at times, respectively, each delayed by a τi=Li/c, to output said sound wave, where i=0 to N−1, Li represents a distance from each of said N sound sources to said movable part minus a reference distance, and c represents a sonic speed;
• and
• said movable part is positioned in a manner allowing a composite sound field from said plurality of sound sources to be maximized.

A inspection method of evaluating a property of at least one microstructure having a movable part formed on a substrate, comprising the steps of:

• adjusting a composite wave to be a predetermined test sound wave for output, said composite wave being composed of sound waves output from a plurality of sound sources in a test;
• and
• detecting how said movable part of said microstructure moves in response to said test sound wave, and evaluating said property of said microstructure from how said movable part moves, as detected, wherein:
• said plurality of sound sources are arranged to each have a difference in distance to said movable part, the difference being an integer multiple of a wavelength of said sound wave;
• and
• said movable part is positioned in a manner allowing a directivity coefficient R(θ)=1 so as to allow a composite sound field from said plurality of sound sources to be maximized.

A storage medium having stored therein an inspection program executable by a computer of a microstructure inspecting device for evaluating a property of at least one microstructure having a movable part formed on a substrate, said program causing said computer to perform the steps of:

• adjusting a composite wave to be a predetermined test sound wave for output, said composite wave being composed of sound waves output from a plurality of sound sources in a test;
• and
• detecting how said movable part of said microstructure moves in response to said test sound wave, and evaluating said property of said microstructure from how said movable part moves, as detected, wherein:
• said plurality of sound sources are arranged to each have a difference in distance to said movable part, said difference being an integer multiple of a wavelength of said sound wave;
• and
• said movable part is positioned in a manner allowing a directivity coefficient R(θ)=1 so as to allow a composite sound field from said plurality of sound sources to be maximized.