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US 7,726,189 B2Granted
Nonlinear micromechanical resonator
AssigneePurdue Research Foundation
InventorsAshwin Vyas, Anil K. Bajaj, Dimitrios Peroulis
Life of this patent
Estimating the term…
Abstract
A micromechanical resonator having an actuator configured to provide an excitation, a second component configured to move within a plane at a second frequency in response to the excitation of the actuator, and a first component coupled with the second component such that the movement of the second component at the second frequency induces resonant excitation of the first component that is substantially completely out of the plane.
Claims16
A micromechanical resonator comprising:
- an actuator configured to provide an excitation;
- a second component configured to move within a plane at a second frequency in response to the excitation of the actuator;
- and
- a first component non-linearly coupled with the second component such that the movement of the second component at the second frequency induces resonant excitation of the first component that is substantially completely out of the plane;
- wherein the movement of the second component at the second frequency induces the resonant excitation of the first component at a first frequency that is approximately one half of the second frequency such that the first and second components have a 1:2 resonance and wherein the 1:2 resonance between the first and second components and mass sensitivity is substantially completely maintained, regardless of a medium in which the micromechanical resonator is located.
2 more elements
A micromechanical resonator comprising:
- a structure having a first component and a second component;
- and
- an actuator configured to induce movement of the second component at a second frequency and substantially completely within a plane;
- wherein the first component is non-linearly coupled to the second component such that the movement of the second component at the second frequency induces resonant excitation of the first component that is substantially completely out of the plane;
- wherein the movement of the second component at the second frequency induces the resonant excitation of the first component at a first frequency that is approximately one half of the second frequency such that the first and second components have a 1:2 resonance and wherein the 1:2 resonance between the first and second components and mass sensitivity is substantially completely maintained, regardless of a medium in which the micromechanical resonator is located.
2 more elements
A mass sensor for determining the mass of an object, comprising:
- a micromechanical resonator including a structure having a first component, a second component, and an actuator configured to induce movement of the second component at a second frequency and substantially completely within a plane, wherein the first component is configured to receive the object, and wherein the first component is non-linearly coupled to the second component such that the movement of the second component at the second frequency induces resonant excitation of the first component substantially completely out of the plane;
- and
- a measurement device for detecting the resonant excitation of the first component to determine the mass of the object.
Dependencies are inferred from the claim text.