Method of fabricating a perpendicular recording write head having a gap with two portions
AssigneeWestern Digital (Fremont), LLC
InventorsYinshi Liu, Benjamin Chen, Kyusik Sin, Hongping Yuan
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Abstract
A method of fabricating a write head for perpendicular recording includes forming a pole layer on an undercoat layer, forming a mask over at least a portion of the pole layer, and forming the pole by removing material from the pole layer. The method further includes forming a first gap portion of a gap along a first side and a second side of the pole, forming a protective layer over at least a portion of the first gap portion, removing the mask, and removing the protective layer. The method further includes forming a second gap portion of the gap over at least a top surface of the pole and forming a shield over at least the second gap portion.
Claims27
A method of fabricating a write head for perpendicular recording, the write head comprising a pole, a shield in proximity to the pole, and a gap between the pole and the shield, the method comprising:
- forming a pole layer on an undercoat layer;
- forming a mask over at least a portion of the pole layer;
- forming the pole by removing material from the pole layer, the pole having a top surface, a first side, and a second side;
- forming a first gap portion of the gap along the first side and along the second side of the pole, the first gap portion comprising a first gap material;
- forming a protective layer over at least a portion of the first gap portion;
- removing the mask;
- removing the protective layer;
- forming a second gap portion of the gap over at least the top surface of the pole, the second gap portion comprising a second gap material different from the first gap material;
- and
- forming the shield over at least the second gap portion.
Dependencies are inferred from the claim text.