Methods and apparatus for enhanced operation of substrate carrier handlers

An apparatus comprising:

• a loadport associated with a tool;
• and
• a communications port adapted to communicate with a Fab including an automated material handling system adapted to load and unload carriers from the loadport and adapted to receive signals from the tool;
• wherein the tool is adapted to:
• transmit a first signal indicating that all substrates to be processed have been removed from a specific carrier and that the specific carrier may be temporarily unloaded from the loadport, and
• transmit a second signal indicating that the specific carrier may be returned to the tool;
• and
• wherein the first and second signals are transmitted to a carrier handler coupled to the tool and adapted to perform a transfer of the carrier, and wherein the carrier handler is operable to remove an empty carrier to make the loadport available for a second carrier.

A method comprising:

• requesting a Fab to temporarily unload a first in-access carrier from a loadport associated with a tool;
• indicating to the Fab a period of time that the first in-access carrier is to be temporarily unloaded from the loadport associated with the tool;
• removing the first in-access carrier from the tool and transferring the first in-access carrier to a storage location;
• loading an unprocessed carrier on the loadport vacated by the first in-access carrier;
• requesting the Fab to load the first in-access carrier to a loadport associated with the tool;
• and
• loading the first in-access carrier to the loadport from the storage location;
• wherein removing and loading the first in-access carrier and unprocessed carriers is executed by a carrier handler adapted to receive the requests, and operable to remove the first in-access carrier to make the loadport available for the unprocessed carrier.

An apparatus comprising:

• a plurality of loadports associated with a tool;
• and
• a controller operative to communicate with a Fab, wherein the controller is adapted to:
• request the Fab to load the first in-access carrier to the loadport associated with the tool;
• and
• request the Fab to temporarily unload a first in-access carrier from a loadport associated with the tool when all unprocessed substrates in the in-access carrier have been removed for processing;
• and
• wherein the controller is further adapted to request the Fab load an unprocessed carrier on the loadport vacated by the first in-access carrier;
• and
• wherein a carrier handler is adapted to execute the load and unload requests, and operable to unload the first in-access carrier to make the loadport available for the unprocessed carrier;
• and
• wherein the controller is further adapted to indicate to the Fab a period of time that the first in-access carrier is to be temporarily unloaded;
• and
• wherein the controller is further adapted to request the Fab load a second in-access carrier on the loadport vacated by the first in-access carrier.